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什么是薄膜气体传感器

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放大字体  缩小字体    发布日期:2019-12-31  浏览次数:685
核心提示:薄膜气体传感器使我们不仅可以检测而且可以区分包括乙醇,苯和一氧化碳的化学元素。这不仅对监控环境状况至关重要,而且对于保护我们免受威胁生命的事件也是必不可少的。

薄膜气体传感器使我们不仅可以检测而且可以区分包括乙醇,苯和一氧化碳的化学元素。这不仅对监控环境状况至关重要,而且对于保护我们免受威胁生命的事件也是必不可少的。

薄膜气体传感器

薄膜传感器可以作为检测局部环境中经常有毒气体水平的重要辅助工具。传感器灵敏度的水平完全取决于用于生产薄膜的方法。生产方法包括但不限于化学气相沉积和反应蒸发。

如今,大多数薄膜气体传感器由小于10纳米(nm)的二氧化钛(TiO 2)膜组成。TiO 2由于其在现代生活中的广泛应用而被广泛使用。以薄膜形式,它可以用作n型半导体。经过广泛研究的用于光催化和气体传感的过程(示例应用:有毒气体)。

有趣的是,TiO 2还应用于固态设备,包括光学应用,如太阳能电池和防腐涂层(例如汽车,建筑物等上的金属)

薄膜气体传感器的影响

大多数人口通常不知道薄膜气体传感器对其生活的影响,这是一个科学领域,在相对模糊的情况下远离公众的关注。

然而,薄膜传感器通常会对许多人每天想当然的事情产生巨大的影响。让我们以薄膜传感器生产的气相沉积法为例。

小于10 nm的TiO 2膜通过原子层沉积(ALD)沉积,以创建用于气体传感器的高度敏感的元件。ALD技术使科学家能够生产亚微米精度厚度控制的均匀薄膜。

原子层沉积技术

这种方法可以生产由多种不同材料制成的薄膜。ALD是一种技术,它使我们能够监视和控制外部环境(例如,容易发生火山活动的区域,城市中心等)中的有毒气体水平。

TiO 2薄膜也已被研究并作为一氧化碳(CO)检测的气体传感器进行了测试。这种检测的健康和商业利益都代表着对工业化社会的巨大影响。使用该技术的CO薄膜检测器通过超声喷雾热解法从氧乙氧基丙酮酸钛开始沉积到钠钙玻璃基板上。

TiO 2的组成和结构性质是使用X射线和电子扫描显微镜技术发现的。当薄膜沉积在摄氏400度以上时,研究人员发现薄膜在结构上是多晶的。多晶结构及其X射线图很好地适合了TiO 2结构。在较低温度下沉积的薄膜显示出非晶结构。

这对检测CO有何帮助?

通过改变传感器的响应厚度和温度来分析TiO 2的灵敏度,然后在不同温度下测量百万分之1-300的CO浓度。通常在摄氏100-300度之间

对于在350摄氏度的基板温度下沉积的薄膜,可获得最高的灵敏度。这种使用TiO 2薄膜传感器的方法在检测CO方面显示出非常积极和准确的结果。一旦完善,这种TiO 2检测传感器的方法将被包含在下一波薄膜气体传感器中。

结论

薄膜气体传感器代表了过去50年检测领域中最积极的飞跃之一。将传感器直接打印在多变的表面(例如皮肤,衣服)上,可以使我们监视和检测我们原本无法做到的事情。

能够用厚度仅为纳米的传感器监视全球范围内潜在危险区域的能力真是太棒了。但是,这项技术的激动人心的应用可能使我们能够探索和监视以前无法访问的更极端的环境。

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关键词: 薄膜气体传感器
 
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